The microcavity is delineated by a cover which is formed on a sacrificial layer and in which at least one hole is formed for removal of the sacrificial layer. A plug covers the hole and part of the cover along the periphery of the hole. The plug is made from a material that can undergo creep deformation...http://www.google.fr/patents/US7635901?utm_source=gb-gplus-shareBrevet US7635901 - Microcomponent comprising a hermetically-sealed cavity and a plug, and method of producing one such microcomponent
Microcomponent comprising a hermetically-sealed cavity and a plug, and ...
