The present invention discloses an apparatus to deposit thin films on a substrate. An ion beam produced by an ion gun, which is radio-frequency excited, impinges upon a target. The target is translatable laterally by a target holder to bring different target materials into contact with the ion beam....http://www.google.fr/patents/US5240583?utm_source=gb-gplus-shareBrevet US5240583 - Apparatus to deposit multilayer films
