A method and an apparatus for irradiating a relatively large area with a charged particle beam. In the method, a pencil-like beam is generated and spread along a fan axis perpendicular to the beam axis. The fan axis is rotated around the beam axis so that finally a circular area is irradiated. The apparatus...http://www.google.fr/patents/US4767930?utm_source=gb-gplus-shareBrevet US4767930 - Method and apparatus for enlarging a charged particle beam
Method and apparatus for enlarging a charged particle beam
