A method and apparatus for transmitting electrical signals and fluids to and/or from a microelectronic workpiece. An apparatus in accordance with one embodiment of the invention includes a shaft rotatable about a shaft axis and having a first end with a first electrical contact portion toward the first...http://www.google.fr/patents/US6673216?utm_source=gb-gplus-shareBrevet US6673216 - Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing
Apparatus for providing electrical and fluid communication to a rotating ...
