An insulated conductive region, such as a doped semiconductor region in a semiconductor substrate and/or a metal conductor carried insulated on a substrate is subjected to non-destructive testing to determine the electrical integrity of the region. The outer portion of the insulating material may be,...http://www.google.fr/patents/US4296372?utm_source=gb-gplus-shareBrevet US4296372 - Techniques for impressing a voltage with an electron beam
Techniques for impressing a voltage with an electron beam