Comprising a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from said vapor deposition table; a second step of introducing said vapor deposition table having said substrate...http://www.google.fr/patents/US6777690?utm_source=gb-gplus-shareBrevet US6777690 - Organic film vapor deposition method and a scintillator panel
Organic film vapor deposition method and a scintillator panel