Controllers and associated methods for controlling a thermal reactor or other thermal semiconductor processors which include a heating element powered by a power source, and having profile thermocouples and spike thermocouples. One preferred method comprises the following steps: modeling thermal dynamic...http://www.google.fr/patents/US5895596?utm_source=gb-gplus-shareBrevet US5895596 - Model based temperature controller for semiconductor thermal processors
Model based temperature controller for semiconductor thermal processors
