A diaphragm assembly includes a silicon diaphragm block which has a diaphragm at an eccentric position thereof, a diffused resistor formed as a pressure-sensitive element on a front surface of the diaphragm, and a silicon support plate bonded to the diaphragm block so as to cover a back surface of the...http://www.google.fr/patents/US4276533?utm_source=gb-gplus-shareBrevet US4276533 - Pressure sensor
