A method for synthesizing a hard diamond-like thin film on a rotating substrate, the method comprising the steps of: generating plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate is provided...http://www.google.fr/patents/US5674573?utm_source=gb-gplus-shareBrevet US5674573 - Method of synthesizing diamond-like carbon thin films
Method of synthesizing diamond-like carbon thin films
