This invention relates to a polishing machine for polishing an article such as a semiconductor wafer. A movable arm is located at a liquid supply position for supplying a liquid such as a polishing liquid onto a polishing surface of a turntable. The arm is also adapted to be moved to and held at a retracted...http://www.google.fr/patents/US6338669?utm_source=gb-gplus-shareBrevet US6338669 - Polishing device
