A cantilever type probe comprising a piezoelectric bimorph cantilever containing a piezoelectric material provided between driving electrodes for driving a cantilever, a probe formed thereon and a drawing electrode for a probe provided along the surface where a probe is formed, wherein there is provided...http://www.google.fr/patents/US5321685?utm_source=gb-gplus-shareBrevet US5321685 - Cantilever type probe, scanning tunnel microscope and information processing apparatus using the same
Cantilever type probe, scanning tunnel microscope and information processing ...
