A method of producing diamond or diamond like films in which a negative bias is established on a substrate with an electrically conductive surface in a microwave plasma chemical vapor deposition system. The atmosphere that is subjected to microwave energy includes a source of carbon, nitrogen and hydrogen....http://www.google.fr/patents/US6447851?utm_source=gb-gplus-shareBrevet US6447851 - Field emission from bias-grown diamond thin films in a microwave plasma
Field emission from bias-grown diamond thin films in a microwave plasma
