An a-Si film is patterned into a linear shape (ribbon shape) or island shape on a glass substrate. The upper surface of the a-Si film or the lower surface of the glass substrate is irradiated and scanned with an energy beam output continuously along the time axis from a CW laser in a direction indicated...http://www.google.fr/patents/US6861328?utm_source=gb-gplus-shareBrevet US6861328 - Semiconductor device, manufacturing method therefor, and semiconductor manufacturing apparatus
Semiconductor device, manufacturing method therefor, and semiconductor ...
