After a pattern is transferred on silicon film crystallized by annealing, the silicon film is annealed by radiation of intense rays for a short time. Especially, in the crystallizing process by annealing, an element which promotes crystallization such as nickel is doped therein. The area not crystallized...http://www.google.fr/patents/US6924213?utm_source=gb-gplus-shareBrevet US6924213 - Semiconductor device and process for fabricating the same
Semiconductor device and process for fabricating the same
