To provide an SPM probe comprising an SPM probe having a piezoresistor and enable to measure surface voltage of a sample. An SPM probe forming a piezoresistor 20 has conductivity covering metal film 22 on a tip surface 12, and conductive layer 24 is wired from the metal film 22 so as to be one side of...http://www.google.fr/patents/US6383823?utm_source=gb-gplus-shareBrevet US6383823 - Probe for scanning probe microscope (SPM) and SPM device
Probe for scanning probe microscope (SPM) and SPM device
