A probe apparatus for probing a device on a semiconductor wafer to be tested by a testing equipment is provided. The probe apparatus includes a replaceable probe tile removably mounted in a probing location on a base plate. The probe tile is configured into a self-contained assembly which includes a...http://www.google.fr/patents/US7626404?utm_source=gb-gplus-shareBrevet US7626404 - Replaceable probe apparatus for probing semiconductor wafer
Replaceable probe apparatus for probing semiconductor wafer
