The present invention is directed to providing a template with alignment marks that are opaque to selective wavelength of light. In one embodiment, a template is provided having patterning areas and a template, with the template mark being formed from metal and disposed outside of the patterning areas....http://www.google.fr/patents/US7136150?utm_source=gb-gplus-shareBrevet US7136150 - Imprint lithography template having opaque alignment marks
Imprint lithography template having opaque alignment marks
