A method for fabricating a hybrid MQW spatial light modulator is described which comprises steps of depositing on a substrate in sequence a first layer to preselected thickness of n+ (or p+) semiconductor material, a second layer to preselected thickness of intrinsic semiconductor material and a third...http://www.google.fr/patents/US5411895?utm_source=gb-gplus-shareBrevet US5411895 - Hybrid multiple quantum well spatial light modulator
Hybrid multiple quantum well spatial light modulator