In a probe card assembly, a series of probe elements can be arrayed on a silicon space transformer. The silicon space transformer can be fabricated with an array of primary contacts in a very tight pitch, comparable to the pitch of a semiconductor device. One preferred primary contact is a resilient...http://www.google.fr/patents/US7064566?utm_source=gb-gplus-shareBrevet US7064566 - Probe card assembly and kit
