A resonant planar optical waveguide probe for measuring critical dimensions on an object in the range of 100 nm and below. The optical waveguide includes a central resonant cavity flanked by Bragg reflector layers with input and output means at either end. Light is supplied by a narrow bandwidth laser...http://www.google.fr/patents/US5905573?utm_source=gb-gplus-shareBrevet US5905573 - Near field optical probe for critical dimension measurements
Near field optical probe for critical dimension measurements
