Phase shifting allows generating very narrow features in a printed features layer. Thus, forming a fabrication layout for a physical design layout having critical features typically includes providing a layout for shifters. Specifically, pairs of shifters can be placed to define critical features, wherein...http://www.google.fr/patents/US7827518?utm_source=gb-gplus-shareBrevet US7827518 - Incrementally resolved phase-shift conflicts in layouts for phase-shifted features
Incrementally resolved phase-shift conflicts in layouts for phase-shifted ...
