In a laser CVD device, immediately before being emitted from a nozzle, raw gas in a reaction chamber reacts opto-chemically with a focused laser beam so that it is decomposed to form a radical flow. The radical flow flows against a substrate set in the reaction chamber so that active materials produced...http://www.google.fr/patents/US4726320?utm_source=gb-gplus-shareBrevet US4726320 - Laser CVD device
