Microstructures are fabricated by impinging a radiation beam, such as a laser beam, through a substrate that is transparent to the laser beam, into a negative photoresist layer on the substrate. The negative photoresist layer may be subsequently developed to provide a master for optical and/or mechanical...http://www.google.fr/patents/US20050058948?utm_source=gb-gplus-shareBrevet US20050058948 - Systems and methods for mastering microstructures through a substrate using negative photoresist and microstructure masters so produced
Systems and methods for mastering microstructures through a substrate using ...
Numéro de demande: 10/661,917 Numéro de publication: US 2005/0058948 A1 Date de dépôt: 11 sept. 2003 Brevet délivré: US7867695 ( Date de délivrance 11 janv. 2011)
