The invention proposes to simplify fabrication of the twin MONOS memory array. The twin MONOS memory array can be embedded into a standard CMOS circuit by the process of the present invention by adding only three additional mask levels. Conventional floating gate devices need ten or more extra masks....http://www.google.fr/patents/US6838344?utm_source=gb-gplus-shareBrevet US6838344 - Simplified twin monos fabrication method with three extra masks to standard CMOS
Simplified twin monos fabrication method with three extra masks to standard CMOS