A high precision automated wafer inspection station provides a base table area on which an X-Y stage is movable in mutually orthogonal directions relative to an inspection axis in alignment with a microscope or measuring instrument which is mounted on a bridge support above the table. The stage mechanism...http://www.google.fr/patents/US4818169?utm_source=gb-gplus-shareBrevet US4818169 - Automated wafer inspection system
