A process for fabricating an electronic circuit by oxidizing the surroundings of a metallic interconnection such as of aluminum, tantalum, and titanium, wherein anodic oxidation is effected at a temperature not higher than room temperature, preferably, at 10.degree. C. or lower, and more preferably,...http://www.google.fr/patents/US5830786?utm_source=gb-gplus-shareBrevet US5830786 - Process for fabricating electronic circuits with anodically oxidized scandium doped aluminum wiring
Process for fabricating electronic circuits with anodically oxidized ...
