The antifuse structure of the present invention includes a bottom planarized electrode, an ILD disposed over the bottom electrode, an antifuse cell opening in and through the ILD exposing the bottom electrode, a first barrier metal layer disposed in the antifuse cell opening to protect the antifuse material...http://www.google.fr/patents/US5541441?utm_source=gb-gplus-shareBrevet US5541441 - Metal to metal antifuse
