To provide a film forming apparatus in which an impurity contained in an organic compound is separated to be removed and a film is formed without decreasing the purity of the purified organic compound, whereby a high-purity organic compound is formed. A film forming apparatus of the present invention...http://www.google.fr/patents/US7481889?utm_source=gb-gplus-shareBrevet US7481889 - Film forming apparatus and film forming method
