In accordance with the objectives of the invention a new method is provided to create aluminum pads that overlay an electrical contact point. A layer of passivation is deposited over the surface that contains one or more electrical contact points, the layer of passivation is patterned thereby creating...http://www.google.fr/patents/US6413863?utm_source=gb-gplus-shareBrevet US6413863 - Method to resolve the passivation surface roughness during formation of the AlCu pad for the copper process
Method to resolve the passivation surface roughness during formation of the ...
