A thin film semiconductor transistor structure has a substrate with a dielectric surface, and an active layer made of a semiconductor thin film exhibiting a crystallinity as equivalent to the single-crystalline. To fabricate the transistor, the semiconductor thin film is formed on the substrate, which...http://www.google.fr/patents/US20070252206?utm_source=gb-gplus-shareBrevet US20070252206 - SEMICONDUCTOR THIN FILM AND METHOD OF MANUFACTURING THE SAME AND SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
SEMICONDUCTOR THIN FILM AND METHOD OF MANUFACTURING THE SAME AND ...
