An apparatus for positioning an object having a substrate and an overlying film and a portion of a photolithography apparatus relative to one another includes a photolithography system, a positioner, an optical system, and a processor. The photolithography system is configured to illuminate a portion...http://www.google.fr/patents/US20050068540?utm_source=gb-gplus-shareBrevet US20050068540 - Triangulation methods and systems for profiling surfaces through a thin film coating
Triangulation methods and systems for profiling surfaces through a thin film ...
Numéro de demande: 10/941,622 Numéro de publication: US 2005/0068540 A1 Date de dépôt: 15 sept. 2004 Brevet délivré: US7292346 ( Date de délivrance 6 nov. 2007)
