The present invention provides a back illuminated photodetector having a sufficiently small package as well as being capable of suppressing the scattering of to-be-detected light and method for manufacturing the same. A back illuminated photodiode 1 comprises an N-type semiconductor substrate 10, a P+-type...http://www.google.fr/patents/US7964898?utm_source=gb-gplus-shareBrevet US7964898 - Back illuminated photodetector
