An apparatus for supercritical processing and non-supercritical processing of a workpiece comprises a transfer module, a supercritical processing module, a non-supercritical processing module, and a robot. The transfer module includes an entrance. The supercritical processing module and the non-supercritical...http://www.google.fr/patents/US6926798?utm_source=gb-gplus-shareBrevet US6926798 - Apparatus for supercritical processing of a workpiece
Apparatus for supercritical processing of a workpiece
