A method of fabricating a light valve device comprises forming a substrate having stacked layers including a light-shielding thin film layer, an insulating film, and a single crystalline semiconductor thin film stacked in this order on a transparent support substrate. A light-shielding layer pattern...http://www.google.fr/patents/US6040200?utm_source=gb-gplus-shareBrevet US6040200 - Method of fabricating semiconductor device having stacked-layered substrate
Method of fabricating semiconductor device having stacked-layered substrate
