A 3-axis straight-line motion stage and a sample test device using the same for supporting a predetermined sample, and comprising X-axis, Y-axis and Z-axis stages for moving the sample independently and precisely in the direction of the X-axis, the Y-axis or the Z-axis of rectangular coordinates. The...http://www.google.fr/patents/US7024925?utm_source=gb-gplus-shareBrevet US7024925 - 3-axis straight-line motion stage and sample test device using the same
3-axis straight-line motion stage and sample test device using the same
