Embodiments of methods for fabricating a spacer structure on a semiconductor substrate are provided herein. In one embodiment, a method for fabricating a spacer structure on a semiconductor substrate includes providing a substrate containing a base structure over which the spacer structure is to be formed....http://www.google.fr/patents/US7294581?utm_source=gb-gplus-shareBrevet US7294581 - Method for fabricating silicon nitride spacer structures
Method for fabricating silicon nitride spacer structures
