A method of fabricating a field emission array that employs a single mask to define the emitter tips thereof and their corresponding resistors. A layer of conductive material is disposed over a substrate of the field emission array. A plurality of substantially mutually parallel conductive lines is defined...http://www.google.fr/patents/US6059625?utm_source=gb-gplus-shareBrevet US6059625 - Method of fabricating field emission arrays employing a hard mask to define column lines
Method of fabricating field emission arrays employing a hard mask to define ...
