A method, system, and computer readable medium for facilitating a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool, and inputting a first principles physical model relating to the semiconductor...http://www.google.fr/patents/US8050900?utm_source=gb-gplus-shareBrevet US8050900 - System and method for using first-principles simulation to provide virtual sensors that facilitate a semiconductor manufacturing process
System and method for using first-principles simulation to provide virtual ...
