Devices for providing tri-axial measurements in an x-direction, a y-direction, and a z-direction and methods of their manufacture are disclosed. The devices comprise a leadframe, at least one X- and Y-axis sensor die, at least one integrated circuit, and a Z-axis sensor. The Z-axis sensor is encapsulated...http://www.google.fr/patents/US7536909?utm_source=gb-gplus-shareBrevet US7536909 - Three-dimensional multi-chips and tri-axial sensors and methods of manufacturing the same
Three-dimensional multi-chips and tri-axial sensors and methods of ...
