Dielectric layers containing a zirconium-doped tantalum oxide layer, where the zirconium-doped tantalum oxide layer is formed of one or more monolayers of tantalum oxide doped with zirconium, provide an insulating layer in a variety of structures for use in a wide range of electronic devices....http://www.google.fr/patents/US7776762?utm_source=gb-gplus-shareBrevet US7776762 - Zirconium-doped tantalum oxide films
