A method (300) of characterizing a lithographic scanning system includes the steps of printing a first pattern (302) using a reticle (220) having a first orientation with respect to the lithographic scanning system and measuring a critical dimension of the first pattern at a plurality of points (310)....http://www.google.fr/patents/US6208747?utm_source=gb-gplus-shareBrevet US6208747 - Determination of scanning error in scanner by reticle rotation
Determination of scanning error in scanner by reticle rotation
