Low contrast optics, including low contrast linear light valves, can be used to create high resolution patterns by using thermoresist instead of photoresist and by using multiple exposures of the same area, preferably exposing different features of the pattern in each exposure. When using thermoresist,...http://www.google.fr/patents/US6136509?utm_source=gb-gplus-shareBrevet US6136509 - Method of exposing thermoresist
