The present invention provides a processing system, a processing method and a program, which can readily control a gas flow rate. A vertical-type heating apparatus 1 includes a plurality of gas supply pipes 16 to 20 each adapted for supplying a processing gas into a reaction vessel 2 configured to contain...http://www.google.fr/patents/US8055372?utm_source=gb-gplus-shareBrevet US8055372 - Processing system, processing method, and computer program
Processing system, processing method, and computer program
