A system for manufacturing semiconductor integrated circuit (IC) devices, including an operating control system, a process intermediate station in communication with the operating control system, and a gas purge device, wherein the gas purge device is included in the process intermediate station....http://www.google.fr/patents/US7203563?utm_source=gb-gplus-shareBrevet US7203563 - Automatic N2 purge system for 300 mm full automation fab
Automatic N2 purge system for 300 mm full automation fab
