Disclosed are capacitive pressure probes or sensors for high temperature applications. The capacitive pressure sensors of the present invention include, inter alia, a sapphire diaphragm which is disposed within an interior sensing chamber of the probe housing and has a first electrode formed on a central...http://www.google.fr/patents/US8141429?utm_source=gb-gplus-shareBrevet US8141429 - High temperature capacitive static/dynamic pressure sensors and methods of making the same
High temperature capacitive static/dynamic pressure sensors and methods of ...
