Semiconductor structures are disclosed including a substrate comprising a semiconductor material and having opposed first and second surfaces, and at least one conductive via extending from the first surface to the second surface. The conductive vias can extend at angles relative to the first surface,...http://www.google.fr/patents/US7804175?utm_source=gb-gplus-shareBrevet US7804175 - Semiconductor structures including conductive vias continuously extending therethrough and methods of making the same
Semiconductor structures including conductive vias continuously extending ...
