An extreme ultraviolet (EUV) light source device and foil trap, the device including a vessel; an EUV radiating species supply means that feeds an extreme ultraviolet radiating species into the vessel; a discharge part with discharge electrodes that heat and excite the EUV radiating species and generate...http://www.google.fr/patents/US8076659?utm_source=gb-gplus-shareBrevet US8076659 - Foil trap and extreme ultraviolet light source device using the foil trap
Foil trap and extreme ultraviolet light source device using the foil trap
