A vacuum-forceps is disclosed. A valve chamber is provided between a first suction passage communicating with an adsorptive member and a second suction passage connected through a suction tube to a vacuum source. A valve member linked to an operating push button is accomodated in the valve chamber. The...http://www.google.fr/patents/US4767142?utm_source=gb-gplus-shareBrevet US4767142 - Forceps for semiconductor silicon wafer
