The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected...http://www.google.fr/patents/US7557932?utm_source=gb-gplus-shareBrevet US7557932 - Characterization of micromirror array devices using interferometers
Characterization of micromirror array devices using interferometers
