A high-yield micromirror device and fabrication method. Address electrodes (310) and a separate mirror bias/reset conductor (312) are disposed on a substrate (304). A micromirror superstructure including torsion beam support posts (116), torsion beam hinges (120), a torsion beam yoke (114), a mirror...http://www.google.fr/patents/US6323982?utm_source=gb-gplus-shareBrevet US6323982 - Yield superstructure for digital micromirror device
Yield superstructure for digital micromirror device
